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18 ST/Industrial Sensing Solutions STMicroelectronics Industrial Sensors eBook - Videos Video Title URL Predictive Maintenance & Monitoring Solution https://www.mouser.com/video/?videoId=6024440845001 IIS328DQ 3-Axis Linear Accelerometer https://www.mouser.com/video/?videoId=5088943196001 L20G20IS Two-Axis MEMS Gyroscope https://www.mouser.com/video/?videoId=5747109098001 Getting Started with LSM6DSOX https://www.mouser.com/video/?videoId=6097814870001 u L20G20IS Two- Axis MEMS Gyroscope The Rise of MEMS Sensors in Smart Industry By Jay Esfandyari, Ph.D., Senior Manager, MEMS & Sensors Product Marketing at STMicroelectronics T here are many industrial applications for Mi- cro-electro-Mechanical-Systems (MEMS)-sensors. For example, vibration monitoring as part of predictive maintenance is an essential part of a productive and efficient smart factory. The amount of data collected through these sensors increases dramatically and, therefore, the processing and analysis of the sensor data become a critical part of the entire solution. This arti- cle will review the technologies and applications of some of the sensors used in industrial products, in Industry 4.0 solutions, and building automation. Accelerometer A MEMS-based accelerometer is used to measure the ac- celeration over time. In static conditions, the projection of gravity on the three axes allows computing tilt angles and orientation in the space. Therefore, an accelerometer can be used to measure linear acceleration, inclination, and vibration. Accelerometers enable many applications. There are different types of accelerometers available such as piezoelectric, capacitive, potentiometric ones. However, the MEMS-based accelerometers primarily use the technol- ogy based on capacitive principle, and we will discuss it. Below is shown the basic concept of a capacitive acceler- ometer and the equivalent circuit (Figure 1). The main advantages of the capacitive technology are temperature stability, high production yield rate, and cost-effective. MEMS-based accelerometers have found many applications in various market segments. Asset Tracking and Supply Chain An Accelerometer may get employed for asset tracking and shock detection. The accelerometer can detect if an object has moved from a specific position. This sensor can also detect the free fall. The manufacturer may use this feature by evaluating the acceleration data during the free fall to determine if the device gets damaged after the free-fall. There are already many products on the market with an accelerometer for these and other applications. Real-Time Condition Monitoring A Vibration sensor monitors the acceleration present during machine operation and detects an overall increase in machine vibration that would indicate a potential machine issue. Monitoring vibration is one of the essential tasks when you start to create a strategy for a predictive maintenance solution. The latest improvement in MEMS ac- celerometer technology is used to manufacture inclinome- ters with high resolution and high accuracy. These incli- nometers may get employed in antenna pointing, platform leveling, and structural health condition monitoring. Take as an example the case of power transformers to ex- plain the condition monitoring of a machine using accel- erometers. Power transformer asset management is consid- ered one of the critical parts of a power system because of the substantial investments in the transformers and also