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ST - Industrial Sensing Solutions

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LIS2DTW12TR Accelerometers MEMS Digital Output Dual Motion and Temperature Sensor • Ultra-low power consumption: 50nA in power-down mode, below 1μA in active low-power mode • Very low noise: Down to 1.3mg RMS in low-power mode • 0.8°C (typ. accuracy) embedded temperature sensor LEARN MOREu LPS33HW Pressure Sensor • 260 to 1260hPa absolute pressure range with water-resistant package • Current consumption down to 3μA • High overpressure capability of 20x full scale with embedded temperature compensation LEARN MOREu One of the critical parameters is the sensitivity that is a crucial factor in determining the signal-to-noise ratio of a microphone. The sensitivity of the device, the Acoustic Overload Point (AOP), size, etc. depends on the design of the membrane. For example, a 4-point membrane anchor design used by ST provides high sensitivity while minimizing the sensor size. There are several advantages of MEMS microphones over the ECM (Electret Condenser Microphones), among oth- ers, mechanical robustness, excellent sensitivity matching from unit to unit, and very little change in sensitivity over temperature providing very high-temperature stability that is critical for many applications (Figure 12). 23 23 ST/Industrial Sensing Solutions Figure 11: Popular applications of the latest MEMS-based humidity sensors. Figure 12: Working principle of a capacitive MEMS microphone.

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