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Murata - 9 Industry Experts Discuss MEMS Technology

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Unsurprisingly, these systems had shortcomings in terms of accuracy, size, and durability. While a bubble-based sensor can be highly accurate, calibration is difficult and the measurement ranges are very limited. Other electronic inclinometers like optical vias also have shortcomings in measurement range and calibration complexity. Today, MEMS enable a new class of electronic leveling solutions that are easy to use and provide readily accessible digital data for systems to interpret. These leveling solutions leverage MEMS- based accelerometers and gyroscopes to measure the tilt and rotation of a device in various planes. The use of MEMS has many benefits in the leveling space. First off, MEMS allow for significant device miniaturization. As compared to historical leveling solutions, this miniaturization has brought leveling to applications where it was previously size- prohibitive. Compared to bubble-based solutions, MEMS also offer a significant improvement in durability. Consider a piece of heavy-duty construction equipment, for example. This tool will likely experience significant shock and vibration, certainly enough to break a bubble solution based on a glass tube. MEMS, on the other hand, are more robust and durable, allowing them to endure significant shock without damage or impact on data accuracy. MEMS-based leveling also enables significantly higher accuracy and range than other solutions—an important benefit in industrial applications, which require the utmost precision for process optimization. C h a p t e r 2 | M E M S - B a s e d L e v e l i n g MEM sensors improve performance in size, cost, and resolution for different industries. They also provide a short time to market and small size. MEMS help designers achieve ultra- low power and noise reduction while providing several sensor outputs to measure acceleration, gyro data, micro deformation, and activity detection." Jean Paul Talledo Vilela Senior Technology Implementer, Virginia Tech Transportation Institute 11 9 Industry Experts Discuss MEMS Technology

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